Space electric field concentrated effect for Zr:SiO2 RRAM devices using porous SiO2 buffer layer

نویسندگان

  • Kuan-Chang Chang
  • Jen-wei Huang
  • Ting-Chang Chang
  • Tsung-Ming Tsai
  • Kai-Huang Chen
  • Tai-Fa Young
  • Jung-Hui Chen
  • Rui Zhang
  • Jen-Chung Lou
  • Syuan-Yong Huang
  • Yin-Chih Pan
  • Hui-Chun Huang
  • Yong-En Syu
  • Der-Shin Gan
  • Ding-Hua Bao
  • Simon M Sze
چکیده

To improve the operation current lowing of the Zr:SiO2 RRAM devices, a space electric field concentrated effect established by the porous SiO2 buffer layer was investigated and found in this study. The resistive switching properties of the low-resistance state (LRS) and high-resistance state (HRS) in resistive random access memory (RRAM) devices for the single-layer Zr:SiO2 and bilayer Zr:SiO2/porous SiO2 thin films were analyzed and discussed. In addition, the original space charge limited current (SCLC) conduction mechanism in LRS and HRS of the RRAM devices using bilayer Zr:SiO2/porous SiO2 thin films was found. Finally, a space electric field concentrated effect in the bilayer Zr:SiO2/porous SiO2 RRAM devices was also explained and verified by the COMSOL Multiphysics simulation model.

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عنوان ژورنال:

دوره 8  شماره 

صفحات  -

تاریخ انتشار 2013